Bio-MEMS: Technologies and Applications by Wanjun Wang, Steven A. Soper

By Wanjun Wang, Steven A. Soper

Microelectromechanical structures (MEMS) are evolving into hugely built-in applied sciences for quite a few program components. upload the organic size to the combination and a number of latest difficulties and matters come up that require a vast figuring out of facets from simple, fabrics, and clinical sciences as well as engineering. gathering the efforts of well known leaders in every one of those fields, BioMEMS: applied sciences and purposes provides the 1st wide-reaching survey of the layout and alertness of MEMS applied sciences to be used in organic and clinical components. This publication considers either the original features of organic samples and the demanding situations of microscale engineering. Divided into 3 major sections, it first examines fabrication applied sciences utilizing non-silicon techniques, which use fabrics which are applicable for medical/biological analyses. those contain UV lithography, LIGA, nanoimprinting, injection molding, and hot-embossing. awareness then shifts to microfluidic parts and sensing applied sciences for pattern coaching, supply, and research. the ultimate part outlines quite a few purposes and platforms on the innovative of BioMEMS know-how in numerous parts reminiscent of genomics, drug supply, and proteomics. Laying a cross-disciplinary starting place for extra improvement, BioMEMS: applied sciences and functions offers engineers with an realizing of the organic demanding situations and organic scientists with an realizing of the engineering demanding situations of this burgeoning know-how.

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An obvious approach to increased diffusion efficiency is to maximize the effective interfacial areas of the two samples to be mixed. According to the scaling law, the most effective way to maximize the effective surface area of liquid is to convert it into plumes of stream. This is the approach we have adopted in our design of the micromixer. The micromixer/reactor has a simple structure and significantly boosts the mixing efficiency by increasing the interfacial contact with the impinging plumes from two opposite arrays of more, but smaller-sized, micronozzles.

6. 3% at the iline, 82% at the h-line, and 82% at the g-line. The PMMA sheet filters out most of the light with a wavelength less than or equal to 365 nm. 6 where the i-line is removed, and the h-line and g-line are reduced. 15 mJ/cm2. This result is consistent with that expected from the transmission spectrum of PMMA measured using a spectrometer. 6 after PMMA filter is dominated by the h-line, the effect of the g-line in the lithography of SU-8 will therefore be neglected under such conditions.

6] J. Williams and W. Wang, UV-LIGA fabrication of electromagnetic power microrelays, presented at the International Symposium on Test and Measurement (ISTM/2001), Shanghai, China, June 2001. [7] C. Oropeza, K. Lian, and W. Wang, “Fracture toughness study on LIGA fabricated microstructures,” presented in Micromachining and Microfabrication, Photonics West, San Jose, California, January 2003. fm Page 41 Tuesday, November 14, 2006 10:41 AM UV Lithography of Ultrathick SU-8 41 [8] D. E. -P. Chen, S.

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