Characterization Of Semiconductor Materials by McGuire G. E. (ed.)

By McGuire G. E. (ed.)

Characterization of semiconductor fabrics and techniques used to symbolize them can be defined commonly during this new Noyes sequence. Written by means of specialists in every one topic zone, the sequence will current the main up to date details on hand during this swiftly advancing box. contains chapters on electric Characterization, Ion Mass Spectrometry, Photoelectron Spectroscopy, Ion/Solid Interactions and extra.

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Schumann, Jr. E. Gardner Application of Multilayer Potential Distribution to Spreading Resistance Correction Factors, J. Electrochem. Sot. 116, 87-91 (1969). Electrical Characterization of Semiconductor Materials and Devices 47 120. W. H. Nicollian Silicon Impurity Distribution as Revealed by Pulsed MOS C-V Measurements, J. Electrochem. Sot. 118, 138-141 (1971). 121. M. J. V. Gray Doping Profiles by MOSFET Deep Depletion C(V), J. Electrochem. Sot. 122, 121-127 (1975). 122. T. M. Faktor An Automatic Carrier Profle Plotter Using an Electrochemical Technique, J.

A potential is applied between the electrolyte and the semiconductor. A small modulation of the anode potential produces a corresponding modulation of the space-charge region and hence of the measured capacitance. From this the carrier concentration is obtained. Periodically a current is applied to this electrolytic cell. For the appropriate electrolyte the semiconductor in contact with the electrolyte is dissolved or etched during the current flow period. (30), plus the “dissolved depth”, Wd. The ‘dissolved depth” is proportional to the integral of the product of current and time and is precisely measured.

This section will cover the basic DLTS theory, measurement techniques and their application to various semiconductor structures. 2 DLTS Theory A level in the bandgap of a semiconductor can be characterized by exploiting its 26 Characterization of Semiconductor Materials emission behavior as a function of temperature. The activation energy of a deep level is energy between the energy level and its respective band. Deep levels are also called traps. What determines the type of trap (electron trap or hole trap) is its proximity to either the conduction or valence band as shown in Figure 11.

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